DESTRUCT UNIT SPECIFICATIONS
X 0.083” tubing
X 0.083” tubing
INSTRUCTIONS FOR THE HA SERIES OZONE DESTRUCT UNIT
The HA series ozone destruct unit utilizes a thermal-catalytic method
to remove excess ozone. The catalyst is a transition metal manganese
dioxide-copper oxide material. It is not consumed by the ozone and
acts as a true catalyst. The material is non-hazardous and can be
removed to a Class 1 landfill. The conversion of ozone to oxygen
is an exothermic reaction and the combination of catalyst and heat
generated in the reaction is a very efficient method of ozone destruction.
External temperatures may reach as high as 150 C and steps must
be taken to prevent accidental contact with an operator.
Download HA-434 General Layout PDF
Download HA-434 Performance PDF
The HA unit is typically mounted vertically and ozone gas flows
from bottom to top of the unit. An arrow etched on the unit shows
the flow direction. The unit must be supported securely to a wall
or strut, either with pipe straps or from below the catalyst canister.
The latter is the recommended method. The exit is out the top of
the unit and must not be obstructed. The exit of the HA unit can
be left open to atmosphere or piped to an outside area or scrubber,
away from personnel. The HA is designed to have a 0.00 ppm ozone
concentration at its exit. Be sure that the ozone flow rate does
not exceed the specifications for the unit. If the flow rate is
too high, complete ozone destruction will not take place. Performance
curves for the HA units are available.
The unit will also work if mounted horizontally, but this is not
recommended. It is possible that some ozone gas could by-pass the
The standard HA unit is supplied with welded end connections and
is welded into the operating line to prevent leaks. However, the
unit is also available with compression and VCR fittings. A refillable
option is also available.
Pressure drop of each unit is designed to be less than 1 inch water
Before using the HA ozone destruct unit, be sure to check for leaks
in the system. The unit is helium leak checked at the factory, but
connections should be checked after installation. At that time,
ozone offgas can be introduced into the destruct unit. On cold start-up,
a break through of ozone may take place. Typically, this is on the
order of 0.05 – 0.010 ppm ozone or less. This break though
should last for less than one minute, until the unit heats as result
of the heat of reaction. Check again for leaks and make sure that
no ozone can be detected in the room. A room monitor is still recommended,
even when the ozone destruct unit is used.
PLEASE DO NOT TOUCH THE UNIT WHILE IN OPERATION!!!
LIFE OF THE CATALYST
The manganese dioxide-copper oxide is a true catalyst and is not
consumed. However, certain contaminants can reduce the reactivity
of the unit. These contaminants include hydrocarbons, moisture,
and particles. Of particular interest in semiconductor applications,
NOx (oxides of nitrogen) may reduce the reactivity of the unit over
time. The NOx is a by-product of some high concentration ozone generators,
particularly if the generator is doped with nitrogen, typically
0.5-2.0 % by volume. The life of the catalyst will depend on the
doping rate and the number of hours the unit is operated. A typical
lifetime for a unit in these conditions is 1-5 years.
HA-434 installed in a Gas
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